M6 Hybrid SIMS
TOF-SIMS & LEIS Technique
Paints and Coatings
Data & Facts
The latest, multi-purpose instrument guaranteeing superior performance in all application areas.
The M6 Plus platform combines high-end SIMS performance with in situ SPM capabilities.
M6 Hybrid SIMS
High performance TOF-SIMS and Orbitrap SIMS combination instrument ideally suited for organic SIMS application.
Low Energy Ion Scattering
Extremely surface sensitive instrument, providing unique and quantitative characterisation of the top atomic layer.
Versatile instrument operation, data acquisition and data analysis software package for all IONTOF instruments.
How it works
TOF-SIMS and LEIS
Learn more about how advanced surface analysis works.
The detection and quantification of trace metals is an important analytical task in the semiconductor industry.
Discolourations on polymers are often caused by phase separation of the material's components.
Paints and Coatings
Coatings are of increasing importance for many industrial products for reasons of decoration as well as stability.
The ability to image molecular compounds with high special resolution is very useful for biological applications.
SIMS can be used to determine the distribution of the different ingredients within pharmaceutical products.
TOF-SIMS is a very powerful technique for the analysis of non-conductive materials e.g. glass.
Paper surfaces are treated to obtain special surface properties. These modifications can be investigated.
One major advantage of TOF-SIMS is the opportunity to combine high lateral and high depth resolution.
For catalysis the characterisation of the top atomic layer is essential. LEIS is the ideal technique for this application.
Today, the IONTOF group consists of four different companies located in Germany, the USA and Japan.
Stay in touch with IONTOF and learn more about the latest development around our products and applications.
IONTOF participates in many different conferences, workshops and other events all over the world.
Data & Facts
IONTOF's success is based on the longstanding experience in the field and the skills of our scientists and engineers.
If you are interested in a new challenge in an innovative working environment, IONTOF might be the place for you.
One can only be successful if deep understanding of the challenges can be combined with longstanding experience.
IONTOF is not only committed to developing products that are safe and environmentally sound.
Since 1989, the contribution of IONTOF to the development of the TOF-SIMS technique has been unceasing.
When help is needed there is no time to waste.
The IONTOF service team is available.
The IONTOF sales team supports potential customers to find the best solution for their demands.
Find brochures and application notes here.
The IONTOF download area for access to the SurfaceLab software updates, helpfiles and release notes.
For information about our products and services, please complete the information request form.
Help us to get even better and send us your suggestions or report any problems you experienced.
For analytical service IONTOF works in a close cooperation with Tascon, specialised in analytical service.
Service-Ingenieur (m/w/d) Standort Ostdeutschland
Technischer Einkäufer (m/w/d)
Full-Stack-Entwickler für globale Workflows (m/w/d)
Technisch-strategischer Einkäufer (m/w/d)
Current job openings
M6 - the ultimate SIMS machine
Advanced Ion Beam Technology for Surface Analysis
SurfaceLab 7.3 Release
at IONTOF (m/w/d): Service-Ingenieur, Technischer Einkäufer, Software-Entwickler, Full-Stack-Entwickler, Elektroniker, Einkäufer
New Subsidiary IONTOF Japan K.K.
10. - 13.09.2023 - AOFKA 2023, Zürich, Switzerland
13. - 15.09.2023 - Rice Workshop on SIMS, Rice University, Texas, USA
SurfaceLab Software Updates
M6 - SIMS technology one step ahead
The M6 is the latest generation of high-end TOF-SIMS instruments developed by IONTOF. New ground-breaking ion beam and mass analyser technologies make the M6 the benchmark in SIMS instrumentation and the ideal tool for industrial and academic research.
Ground-breaking new developments for the M6
The M6 TOF Analyser
The revolutionary design of the extraction optics, the ion transfer and detection system provides a new level of mass resolution, mass accuracy and transmission. This level of performance allows mass interferences of e.g. CH/
/N containing molecules to be resolved even in the higher mass range, thus facilitating molecular peak identification.
In combination with high repetition rates and the improved primary ion currents of the Nanoprobe 50, three times lower detection limits can be achieved in dual beam depth profiling.
The new design has also been optimised for the measurements in the so-called delayed extraction mode making it the first TOF-SIMS instrument on the market to combine high resolution imaging with spot sizes below 50 nm with high mass resolution spectrometry.
The Nanoprobe 50 is the latest generation bismuth cluster ion source for the M6. The source provides pulsed primary ion currents of up to 40 pA and an ultimate lateral resolution of well below 50 nm. The bipolar bunching system can operate at repetition rates of up to 50 kHz, allowing for extremely high data rates and improved detection limits. The Nanoprobe 50 is the ideal primary ion source for high lateral resolution microanalysis and imaging as well as high mass resolution surface spectrometry and depth profiling.
50 nm lateral resolution guaranteed
Bipolar bunching system for improved spectrometry performance and ease of operation
In-column measurement of mass separated, pulsed primary ion currents
The interpretation of organic TOF-SIMS spectra can be quite challenging and requires a reasonably experienced user. To facilitate data interpretation IONTOF provides different tools such as spectra libraries, advanced software package and the ultimate performance Orbitrap
extension for the M6. With the new TOF MS/MS option IONTOF now also offers a more cost effective MS/MS solution for the M6. The option is ideally suited for quick confirmation of anticipated contaminants or compositions and fast MS/MS imaging or depth profiling applications. Key features of the new TOF MS/MS are:
High transmission (> 80%) and sensitivity
High mass resolution precursor selection to avoid MS2 fragmentation pattern interferences
Sequential, full MS1 and MS2 data streams with individually optimised analysis conditions
The M6 Plus
Combining SIMS and SPM in situ
M6 Plus - The tool for nano characterisation
Information concerning chemical composition, physical properties and the three-dimensional structure of materials and devices at the nanometre scale is of major importance for new developments in nanoscience and nanotechnology. The new M6 Plus platform combines the high-end performance of the M6 with the possibility to perform in situ SPM measurements making it the ideal tool for high-end nano characterisation.
The M6 Hybrid SIMS
Hybrid SIMS - Surface analysis meets organic mass spectrometry
With the Orbitrap
extension for the M6, IONTOF provides the first commercial SIMS instrument which combines the highest mass resolution (> 240,000) and highest mass accuracy (< 1 ppm) with high resolution cluster SIMS imaging. The powerful combination of the gas cluster ion source and the Orbitrap
analyser enables the distinction of different features even in highly complex organic samples.
High performance low energy ion scattering (LEIS)
Quantitative top atomic layer characterisation
With the Qtac IONTOF offers a high sensitivity Low Energy Ion Scattering (LEIS) instrument. The extreme surface sensitivity of LEIS makes the Qtac the perfect instrument to study surface processes in many production and research areas on materials such as catalysts, semiconductors, metals, polymers, and fuel cells.
+49 (0)251 1622-100
+49 (0)251 1622-199
07. - 13.10.2023 - 26
IBA 2023, Toyama, Japan
06. - 10.11.2023 - AVS 69 Portland, Oregon, USA
15. - 17.11.2023 - 4
workshop for Microscopy and Microanalysis, Turku, Finland